استعرض حسب المؤلف "Abugalia, Ahmed"
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Finite element modeling and simulation of a microstructure silicon beam resonant
Shaglouf, Mohamed; Diryak, ElJaroshi; Abugalia, Ahmed (CEST-2018, 2018-09-27)This paper establishes the Finite Element Method (FEM) model of a practical silicon beam resonator attached to a diaphragm used for measuring pressure. In this paper presents two location error models. Analyze, calculate, ...