Browsing by Subject "RF magnetron sputtering, excimer laser annealing, post pattering, pre pattering, thin film transistors, IGZO."

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    • Excimer Laser Processing of IGZO Thin Films for Transparent TFTs 

      Abusabee, Khairi; Alajel, Khalid; Elhamali, Salem (CEST-2018, 2018-09-27)
      The effects of post deposition annealing treatments on indium gallium zinc oxide IGZO thin films deposited by radio frequency RF magnetron sputtering at ambient temperature have been studied for application to thin film ...