| dc.contributor.author | Shaglouf, Mohamed | |
| dc.contributor.author | Diryak, ElJaroshi | |
| dc.contributor.author | Abugalia, Ahmed | |
| dc.date.accessioned | 2018-10-08T05:29:29Z | |
| dc.date.available | 2018-10-08T05:29:29Z | |
| dc.date.issued | 2018-09-27 | |
| dc.identifier.uri | http://dspace.elmergib.edu.ly/xmlui/handle/123456789/93 | |
| dc.description.abstract | This paper establishes the Finite Element Method (FEM) model of a practical silicon beam resonator attached to a diaphragm used for measuring pressure. In this paper presents two location error models. Analyze, calculate, and investigate the relationship between the basic natural frequency of the beam resonator and the measured pressure for two error models are discussed. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | CEST-2018 | en_US |
| dc.relation.ispartofseries | CEST2018;5120 | |
| dc.subject | Finite Element Method, Beam, Pressure | en_US |
| dc.title | Finite element modeling and simulation of a microstructure silicon beam resonant | en_US |
| dc.type | Article | en_US |
